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Nitrogen Trifluoride

Nitrogen Trifluoride

CAS No.:7783-54-2 Chemical Name:Nitrogen trifluoride Molecular Formula:F3N Formula Weight:71 MOL File:Mol file...

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CAS No

7783-54-2

Other names

Nitrogen trifluoride

MF

NF3

Formula weight

71

EC No

232-007-1

Place of origin

Dalian,China

Grade Standard

Electron Grade, Industrial Grade

Purity

99%min

Appearance

Colorless

Brand Name

Sky

UN No

UN2451

Valve

Diss640

Boiling Point

-129ºC

Melting Point

207

Cylinder

40L cylinder or as customer requirement

Description

 

Nitrogen trifluoride is a colorless, odorless and stable gas at room temperature. Nitrogen trifluoride in the microelectronics industry as a kind of excellent plasma etching gas, cracking for active fluorine ions in ion etching, the fluorine ion of tungsten and silicon compounds, high purity nitrogen trifluoride excellent etching rate and selectivity to silicon and silicon oxide, which at the time of etching, the etched surfaces without leaving any residue, is a very good cleaning agent, at the same time in chip manufacturing and other areas to get a number of high-energy laser.

 

Usage

 

Nitrogen trifluoride is mainly used as the fluorine source for the high-energy chemical laser OF hf-fluorinated gas. The effective part OF the reaction energy between h2-o2 and F2 (about 25%) can be released by laser radiation. Therefore, hf-of laser is the most promising laser among chemical lasers. Nitrogen trifluoride is an excellent plasma etching gas, the microelectronics industry of silicon and silicon nitride etching, using nitrogen trifluoride than carbon tetrafluoride and carbon tetrafluoride and oxygen mixed gas has higher etching rate and selectivity, and on the surface of no pollution, especially in the thickness of less than 1.5 um IC material etching, nitrogen trifluoride has very excellent etching rate and selectivity, the etched surface without leaving any residue, is also a very good cleaning agent. With the development of nanotechnology and large-scale development of electronic industry, its demand will increase day by day.

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